Founded in 1995, Vital Materials is a global specialty chemicals, specialty gases, targets, wafers, optics, high purity metals, semiconductor equipment, and parts company with leading positions in diversied markets. Major industries served include semiconductors, LEDs, PVs, and displays.

With global headquarters in Guangzhou, China, we have achieved 4 billion US dollars in yearly revenue and more than 9,000 employees in 16 countries.

KE Materials, former DayStar Materials and Lanxess Electronic Materials, manufactures and markets ultra-high purity precursors - Trimethylaluminum (TMA), Trimethylgallium (TMG), Triethylgallium (TEG),
Hafnium tetrachloride (HfCl4) - used as key materials in the manufacture of semiconductor and LED chips as well as other PV and display applications.

KE Materials was established in 2011 for production of ultra-high purity precursors by synthesis and purication of various chemicals in Pyeongtaek, Korea

Vital Compound Semiconductors
BU - KE Materials

• HfCl4 (Hafnium Tetrachloride)

  Formula :	HfCl4
  Molar Mass :	320.3g/mol
  CAS-Reg.-No. :	13499-05-3
  Apprearance :	White powder
  Melting Point :	432°C
  Density :	3.89g/cm3
  Purity :	99.99%
  Packge size :	1.2kg to 4kg
  Production site :	KEM, Pyeongtaek, Korea for 4N Vital, Qingyuan, China for 4N

  

• TMA (Trimethylaluminum)

  Formula :	Al(CH3)3
  Molar Mass :	72.09g/mol
  CAS-Reg.-No. :	75-24-1
  Apprearance :	Colorless liquid
  Melting Point :	15°C
  Density :	0.752g/cm3
  Purity :	99.99% and 99.9999%
  Packge size :	0.3kg to 313kg
  Production site :	KEM, Pyeongtaek, Korea for 4N & 6N Vital, Qingyuan, China for 4N

  

• TMG (Trimethylgallium)

  Formula :	Ga(CH3)3
  Molar Mass :	114.83g/mol
  CAS-Reg.-No. :	1445-79-0
  Apprearance :	Colorless liquid
  Melting Point :	-16°C
  Density :	1.15g/cm3
  Purity :	99.9999%
  Packge size :	1.2kg to 16.2kg
  Production site :	KEM, Pyeongtaek, Korea for 4N & 6N Vital, Qingyuan, China for 4N & 6N

  

• TEG (Triethylgallium)

  Formula :	Ga(C2H5)3
  Molar Mass :	156.9g/mol
  CAS-Reg.-No. :	1115-99-7
  Apprearance :	Colorless liquid
  Melting Point :	-82°C
  Density :	1.06g/cm3
  Purity :	99.9999%
  Packge size :	0.4kg to 1kg
  Production site :	KEM, Pyeongtaek, Korea for 4N & 6N Vital, Qingyuan, China for 4N & 6N

  

List of Vital Materials Products

• Metal Precursor

  • CpHf

    TDMAHf

    TEMAHf

    HfCl4

    HfO2

    CpZr

    TDMAZr

    TEMAZr

    ZrCl4

    ZrO2

    TEMATi

    TDEATi

    TiCl4

    TBTDETi

    TDMATi

    TDMASb

    TESb

    TMSb

    DMZn

    DEZn

    DADI

    TMI

    InCl3

  • TMG

    TEG

    GaCl3

    CP2Mg

    DETe

    DIPTe

    PDMATa

    TDMAGe

    CBr4

    CCl4

    CPFe

    DMCd

    TEPO

    TEB

    TMB

    BTB

    CCTBA

    CpCo(CO)2

    SnCl4

    MACL

    FAI

    DMF

    Cu(acac)2

• Silicon Precursors

  • 4MS

    OMCTS

    ATRP

    DEMS

    3DMAS

    BDEAS

    BTBAS

    DIPAS

    TSA

    DIS

    TEOS

    HCDS

• Specialty Gases

  • GeH4

    GeH4 Mixture

    PH3

    PH3/H2

    AsH3

    BCl3

    1% B2H6/H2

    5% B2H6/N2

    5% B2H6/Ar

    GeF4

    3.5% Ar/Xe/Ne

    30% O2/He

    4% CH4/Ar

    4% H2/N2

    5% H2/He

    0.5% O2/He

    1.2% He/N2

    1.25% Kr/Ne

    4.5%HCl/0.9%H2/Ne

    100ppmH2/Ne